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Reactive Plasma Deposition Equipment
Reactive Plasma Deposition Equipment
Features
·Low temp. process with low damage during deposition, with highcarrier mobility and high transmittance.
·Equipment series range from R&D equipment to mass productionequipment.
·Vertical transfer & Horizontal transfer available.
·Applied in Perovskite, HJT, HBC in PV/Panel Display/IC/Lithium-ionBattery industries.
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