装备名称 Equipment name

管式低压氧化退火装备  Horizontal Low Pressure Oxidation/Annealing Equipment

装备型号 Equipment Model

DOA-420/DOA-420L/DOA-420MAX

装备用途 Equipment Application

低压氧化、退火
。
Low Pressure oxidation, annealing.

手艺特点  Features 

1、大产能
。

High throughput.

2、配套相关专利手艺
，可兼容或升级硼扩散工艺
。
Patented technology, compatible or upgradeable with boron diffusion process.

3、奇异双嵌套炉门结构
。
Unique double-layer-nested furnace door structure.

4、高速平稳整体模组推舟机构
。
High-speed and stable integral module boat pushing mechanism.

装备参数  Parameters