装备名称 Equipment Name

管式二合一PECVD装备  Horizontal PECVD (Two-In-One)

装备型号 Equipment Model

PD-520/PD-520L/PD-520MAX

装备用途 Equipment Application

AlO+SiN薄膜沉积
。

AlOx+SiN deposition.

手艺特点  Features

1、AlOx+SiN二合一同管完成，镌汰工艺环节，有用提升良率、降低碎片率
。

The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.  

2、单机产能优越的二合一设置计划
。
Optimal throughout solution: two-in-one configuration. 

装备参数  Parameters