装备名称 Equipment Name

管式PE-Poly装备  Horizontal PECVD (Poly-Si)

装备型号 Equipment Model

PD-520/PD-520L/PD-520MAX

装备用途 Equipment Application

TOPCon电池隧穿氧化层、i-Poly、D-poly沉积。

Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.

手艺特点  Features

1、隧穿氧化层、i-poly、D-poly三合一同管完成
，镌汰工艺环节
，有用提升良率、降低碎片率。

The tunnel oxide layer, i-poly, and D-poly layers can be coated in the same furnace tube which helps in reducing the process steps, improving the yield and lowering the breakage rate effectively.

2、无热壁特征
，石英管使用寿命长。
Without hot wall effects, so quartz tube has a long service life. 

3、绕镀稍微
，易去除。
Slight wrap-around deposition which is easy to be removed.

4、精准掺杂、可引入其它提效掺杂元素
，工艺拓展、提效空间大。
Precise doping; available to introduce other efficiency-enhancing doping elements, suitable for process expansion and large space for efficiency improvement.

5、防导通专利手艺。
Patented anti-conduction technology.

装备参数  Parameters