全自动石墨舟装卸片机
全自动石墨舟装卸片机
装备名称 Equipment Name
全自动石墨舟装卸片机 Automatic Wafer Handling System for PECVD
装备型号 Equipment Model
SMZ-IV
装备用途 Equipment Application
本装备为在线式，可与一台或两台侧出舟装备对接，实现石墨舟的自动传输和硅片自动装卸，知足在太阳能电池片生产历程中的PECVD工艺前后，将片篮中的硅片自动装载到石墨舟，并将石墨舟运送到PECVD装备中，或将PECVD装备中的石墨舟运送到本装备，并将石墨舟中的硅片自动装载到片篮中 。
Inline equipment, which can be integrated with one or two boat-boat interface PECVD equipment and realize the transportation of graphite boat and wafers load & unload automatically. This equipment can be applied in the process before and after PECVD process, which can load the wafers from the cassette to the graphite boat and transport the fulfilled boat to the PECVD equipment or transport the processed boat to this equipment and unload the wafers from the graphite boat to the cassette automatically.
手艺特点 Features
1、装备�？榛杓�，可以在线毗连?台或两台PECVD 。
With modular design,which can inline integrated with one or two sets of PECVD equipment.
2、接纳PC机控制，平板电脑菜单操作，简朴明晰 。
With PC control,tablet computer operation,which is easy and clear for operation.
3、具有在线隐裂?检测、在线膜厚检测、在线色差检测、在线CCD翘片检测及NG片自动处置惩罚功效（选配功效，价钱另计） 。
Online micro-crack detection,film thickness detection,color inspection system,online CCD wafer warpage detection and automatic dealing with NG wafers(need extra charges).
4、在线/离线设置 。
Inline/offline configuration.
5、匹配AGV,RFID,可选配MES功效 。
Compatible with AGV,RFID system,MES function optional.
装备参数 Parameters
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